Use this url to cite publication: https://cris.mruni.eu/cris/handle/007/38902
Analysis of holographic interferogram of microelectromechanical system with non harmonic cycles excitation
Type of publication
Straipsnis Web of Science ir Scopus duomenų bazėje / Article in Web of Science and Scopus database (S1)
Author(s)
Title
Analysis of holographic interferogram of microelectromechanical system with non harmonic cycles excitation
Publisher (trusted)
Vibromechanika |
Date Issued
| Date |
|---|
2008 |
Extent
p. 42-46
Is part of
Journal of Vibroengineering. Vilnius : Vibromechanika, 2008, Vol. 10, no. 1.
Field of Science
Abstract (en)
Recent technological trends based on miniaturization of mechanical, electromechanical and photonic devices to the microscopic scale have led to the development of microelectromechanical systems (MEMS). Effective development of MEMS components requires the synergy of advanced design, analysis, and fabrication methodologies as well as application of quantitative metrology techniques for characterizing their performance, reliability and integrity during design stage. In this paper, we describe analysis of holographic interferograms of MEMS links which includes holographic interferometric gringes related to deformation appearing because of the non-harmonic excitation of MEMS links.
Type of document
type::text::journal::journal article::research article
ISSN (of the container)
1392-8716
eLABa
2891092
Coverage Spatial
Lietuva / Lithuania (LT)
Language
Anglų / English (en)
Bibliographic Details
8